Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

535 Pages · 1991 · 26.71 MB · English
by Stephen M. Rossnagel & William D. Westwood & Jerome J. Cuomo
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